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| | Abstract | | Seismic reflection survey is main technology used for underground grasp, and while the position does not change in the future, in prospecting by using seismic survey, improvement in resolution, improvement in a S/N ratio, are always taken up as a subject about the quality of data. The authors have developed the high resolution MEMS accelerometer for oil and natural gas prospecting until now. In this research, change of the form of a MEMS element and size and a change of the electronic circuit were made aiming at the further raise in the sensitivity of MEMS of a prototype for the purpose of development of a MEMS accelerometer. It turned out that the MEMS sensor made as an experiment by this research surpasses -130 dB/rootHz which is the world highest performance by the performance evaluation test carried out this time. We are going to strive for the spread of the developed MEMS sensors. |
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