| 講演要旨(和文) | | 水晶技術を利用した，新しいMEMS型重力センサの開発のための試作を行った。センサ構造としては，ATカットの水晶片を使用する片持ち梁構造で，駆動電極と検出電極を備えた静電容量変化型のセンサである．高感度か及び実用化を目標として，ツインセンサ及びそのハイブリッド型の2種類のセンサを試作して感度試験を行った．その結果、1〜5mgal程度の重力変化に対する感度であることが分かった． |
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| | 講演要旨(英文) | | We are developing a new MEMS gravity sensor equipped with the crystal oscillator. The electric capacity change type sensor had been developed on which the drive electrode and the sensing electrode were prepared by making the piece of crystal of AT cut into cantilever structure as a structure of a sensor. We made two kinds of sensors as an experiment, One is a twin sensor and another is the hybrid sensor. The performance test showed that these sensors made as an experiment were the sensitivity of 1 - 5mgal. |
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