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| | Abstract | | We are developing a new MEMS gravity sensor equipped with the crystal oscillator. The electric capacity change type sensor had been developed on which the drive electrode and the sensing electrode were prepared by making the piece of crystal of AT cut into cantilever structure as a structure of a sensor. We made two kinds of sensors as an experiment, One is a twin sensor and another is the hybrid sensor. The performance test showed that these sensors made as an experiment were the sensitivity of 1 - 5mgal. |
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