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| | Abstract | | We developed a new high-sensitive MEMS acceleration sensor for seismic exploration applying automotive control technology of MEMS acceleration sensor. The developed high-sensitive MEMS sensor is an electronic capacitance type using movable overhung silicon plate electrode that has gained achievements for automotive application. Using the developed MEMS acceleration sensors, we built 100 pieces of the prototype sensor that detects 3-axial direction acceleration for the seismic exploration system. The developed high-sensitive MEMS sensor is an electronic capacitance type using movable overhung silicon plate electrode that has gained-achievements for automotive application. We could receive reflected wave from the surface of base near the depth of 1,000m under the ground by use of our developed high sensitivity MEMS-type sensor and its small-sized system, by field test. |
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