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| | Abstract | | We developed two kinds of 3-C seismograms using two kinds of commercial MEMS elements. These sensitivity levels were almost same and were about 3 times as sensitive as one of a geophone used for conventional seismic survey. The internal noise level observed in natural seismic observation was about 100micro kine, and the frequency band was extended to 1Hz or less. We will check the characteristic of low frequency domain using natural earthquake. Moreover, we would like to perform the reexamination of an electronic circuit and the MEMS elements in order to attain high sensitivity. |
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